Optical bar-code scanning requires an actuated mirror to steer a beam of laser light. Future consumer product applications will require scanning mirrors that are smaller, cheaper, and more rugged then are currently available. Applied MEMS has designed a MEMS micro-mirror to meet these requirements. The micro-mirror is completely fabricated from single-crystal silicon to insure optical planarity and repeatable performance over time and temperature. The micro-mirror is electrostatically actuated and offers a large rotation angle of at least +-14° (mechanical). The micro-mirror incorporates novel design features that enable a shock tolerance, in all axes, in excess of 2000G. The architecture and fabrication technology support cost-effective high-volume manufacturing, and the packaging scheme results in a surface-mountable component. Functional prototypes have been successfully implemented into working bar-code scanners. This technology can be applied to other applications such as optical switching, retinal scanning, and image projection for portable displays.
展开▼
