MEMS Based Infrared Carbon Dioxide and Hydrocarbon Gas Sensors

摘要

It is important to monitor carbon dioxide and hydrocarbon gases for several medical, industrial, environmental, health, and safety applications. Both gases are monitored using Infrared (IR) spectroscopy based analyzers that are typically accurate, reliable, but often complex, bulky, and expensive. Additionally hydrocarbon gases are detected with small, less expensive but less reliable catalytic and metal oxide sensors. Using MEMS technology and photonic bandgap structures, Ion Optics is able to integrate the components of an IR gas sensor on to a single device. This allows Ion Optics to provide IR gas sensing performance at the size and cost of electrochemical sensors.