A study of cubic boron nitride films prepared with different deposition times

摘要

Since the physicochemical properties of cubic BN (c-BN) makes it a very useful material for variou industrial and technological applications, cubic boron nitride films have aroused much attention in recent years. In this paper, c-BN films have been prepared by tuned substrate rf magnetron sputtering with different deposition times, which correspond to different growth stages of the BN films.