RFTIR measurement on backside thinned detector film of InSb infrared focal plane arrays

摘要

Reflection Fourier transform infrared (RFTIR) measurements were performed on backside-illuminated InSb infrared focal plane arrays (FPS's) for thinning process monitoring. InSb detector film thickness and its variation across the film can be measured from the RFTIR spectra taken by this contactless and non-destructive technique.