Experimental and numerical study of pulsed laser ablation in vacuum and ambient gas: application to pulsed laser deposition of thin films

摘要

Abstract: The application of the pulsed laser depositiontechnology requires a better understanding of thematerial evaporation mechanisms, of the gas and plasmaplume formation, of its expansion and of its depositiononto the substrate. Experimental and numerical studiesrevealed the importance of the gas-phase collisions onthe formation of a peaked angular distribution ofparticles described by cos$+p$/ $theta@. Numericalcalculations based on a Monte Carlo simulation of thedesorption process were performed showing that thefocusing effect of the angular distribution ofparticles increases with the number of collisions inthe plume. This paper presents a 3D Monte Carlosimulation performed in vacuum and ambient gas in orderto investigate the angular distribution of particles.Besides elastic collisions, therecombination-dissociation reactions proceed in theflow.!31