Distributed waveguide-integrated InGaAs MSM photodetectors for high-efficiency and ultra-wideband operation

摘要

A considerable improvement of bandwidth and efficiency of monolithically integrated distributed InGaAs MSM photodetectors is reported. From a thorough modeling, design criteria for the structural parameters of the optical waveguide and absorber as well as the electrical transmission line are derived which permit the optimization of the quantum efficiency for ultrawideband operation (100-200 GHz). Our experimental results are in very good agreement with the model. Distributed detectors incorporating a ridge waveguide structure embedded in regrown InP are additionally demonstrated to significantly reduce the optical loss of previously reported devices.