Fast, efficient bulk micromachined heater for integrated sensor applications

摘要

The major obstacle a/o in the fabrication of combustive gas sensors (pellistors) is the realization of a fast and efficient heating by moderate power consumption. The scheme introduced in this work overcomes this problem by a suspended, thermally isolated, single crystal silicon heater formed by proous silcion bulk micromachining. The catalyst can than directly be embedded in the rough conditioned surface of the heater, providing a most efficient temperature transfer for combustion.