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Electromigation damage in aluminum alloys studied by l/f noise

机译:用l / f噪声研究铝合金的电迁移损伤

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The electromigration damage in polycrystalline AlSiCu lines caused by dc current densities of the order of magnitude 10~(10) Am~(-2) at 500 K has been investigated by long-time high-resolution ac noise measurements over a wide range of temperatures. A multiple-probe setup allowed us to monitor the electrical resistance increase along the line and to show that sudden enhancements of the noise power and the resistance occurred in the same line segment. The peak in the distribution function N(E) of the activation energies E for the defect motion responsible for l/f noise was found to shift from E_0=0.7 eV with Gaussian width #DELTA#E=0.1 eV in the undamaged samples to E_o=1.0eV and #DELTA#E=0.2 eV in the damaged samples. The latter values are compatilbe with the Cu diffusivity along intermediate-misfit grain boundaries in Al, indicating that the damage process depends not only on the composition but also on the microstructure of the lines. It is proposed that electromigration causes Cu atoms to drift towards and get trapped in grain boundaries, that their thermally activated motion in the boundaries contributes substantially to the l/f noise, and that eventually the Cu atoms assemble on the anode side of the sample. The dependence of the diffusivity on the grain-boundary mismatch may cause flux divergencies at boundary junctions and thus lead to void formation.
机译:通过在宽温度范围内进行长时间高分辨率交流噪声测量,研究了500 K下由10〜(10)Am〜(-2)量级的直流电流密度引起的多晶AlSiCu线中的电迁移损伤。 。多探头设置使我们能够监视沿线的电阻增加,并显示出噪声功率和电阻的突然增强发生在同一线段中。发现负责l / f噪声的缺陷运动的激活能E的分布函数N(E)的峰值从无损样本中的高斯宽度#DELTA#E = 0.1 eV的E_0 = 0.7 eV转移到E_o在损坏的样品中= 1.0eV,#DELTA#E = 0.2eV。后者的值与沿Al中错配晶界的Cu扩散率相适应,表明损伤过程不仅取决于线的成分,还取决于线的微观结构。有人提出,电迁移会导致Cu原子向晶界漂移并陷于其中,它们在晶界中的热活化运动基本上会造成l / f噪声,最终Cu原子会聚集在样品的阳极侧。扩散率对晶界失配的依赖性可能导致边界结处的通量发散,从而导致形成空隙。

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