Micromachined aperture probe for combined atomic force and near-field scanning optical microscopy (AFM/NSOM)

摘要

Abstract: A novel concept for the realization of a multifunctional scanning probe designed for simultaneous atomic force microscopy and near-field scanning optical microscopy measurements is described. It is based on micromachining and thin film technology and includes the fabrication of a cantilever, an integrated optical waveguide, an aperture probe tip, and the integration of all components into the complete sensor. Key processes are the fabrication of the probe providing a sharp tip together with a small optical aperture and the coupling of light from the integrated optical waveguide into the probe tip. The aperture probe consists of a transparent silicon nitride cone covered with aluminum except for the sharp cone tip thus forming a circular aperture around the protruding tip apex. In order to couple light from the waveguide into the tip a simple structure has been developed and optimized using numerical simulation procedures for the electromagnetic field distribution in the coupling structure. The complete sensor is fabricated in a reliable batch process and experimental evidence for the validity of the coupling concept is given. !10