Optical Fiber Humidity Sensor Using a Nano Fabry-Perot Cavity Formed by Electrostatic Self-Assembly

摘要

The electrostatic self-assembly (ESA) process was utilized to fabricate a novel optical fiber humidity sensor based on a nano interferometric cavity. A wide operation range, from 11.3percent to 100percent relative humidity with a maximum variation of 4.77 dB, was experimentally demonstrated. Due to the short length of the interferometric cavity, less than 400 nm, an LED was used as the light source instead of a laser. The fast response time of this humidity sensor, less than 1.5 seconds, makes it possible to monitor human breathing.