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首页> 外文期刊>IEEE sensors journal >Optical fiber gas sensors based on hydrophobic alumina thin films formed by the electrostatic self-assembly monolayer process
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Optical fiber gas sensors based on hydrophobic alumina thin films formed by the electrostatic self-assembly monolayer process

机译:基于通过疏水自组装单层工艺形成的疏水性氧化铝薄膜的光纤气体传感器

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摘要

Optical fiber gas sensors have been fabricated by deposition of Al/sub 2/O/sub 3/ and polymer ultra-thin films on the ends of optical fibers using the electrostatic self assembly monolayer process. These sensors are designed to operate at the standard transmission wavelengths with no cross sensitivity to temperature from at least 10 to 70/spl deg/C. Experimental results of the response of these sensors to organic volatile compounds such as acetone, dichloromethane, or ethanol, are presented. In addition, a thermal curing process is proposed for achieving a humidity cross sensitivity of less than 1.4% from 11% to 85% of relative humidity, this cross sensitivity was still negligible after one year of the thermal curing process.
机译:光纤气体传感器是通过使用静电自组装单层工艺在光纤末端沉积Al / sub 2 / O / sub 3 /和聚合物超薄膜制成的。这些传感器设计为在标准透射波长下运行,对温度至少从10到70 / spl deg / C无交叉敏感性。给出了这些传感器对有机挥发性化合物(例如丙酮,二氯甲烷或乙醇)的响应的实验结果。此外,提出了一种热固化工艺,用于从相对湿度的11%到85%达到小于1.4%的湿度交叉敏感性,经过一年的热固化后,这种交叉敏感性仍然可以忽略不计。

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