An experimental and theoretical consideration of physical design parameters in field-induced charged device model ESD simulators and their impact upon measured withstand voltages

摘要

The effects of changing the physical design parameters of field-induced charged device model (FCDM) ESD simulators have been investigated experimentally and theoretically. The most critical parameter is the DUT-to-field plate spacing, followed by the DUT surface area. Total inductance is also important if the discharge loop is underdamped. These effects can help explain the differences observed between results achieved with the ESDA and JEDEC test modules and will assist the FCDM standardization effort.