Nanostructured silicon thin films deposited by pecvd in the presence of silicon nanoparticles

摘要

Nanostructured silicon thin films have been deposited by plasma enhanced chemical vapor deposition at low substrate temperature (100 deg C) in the presence of silicon nanoparticles.The nanostructure of the films was revealed by transmission electron microscopy,Raman spectroscopy and X-ray diffraction,which showed ordered silicon domains (1-2 nm) embedded in an amorphous silicon matrix.These ordered domains are due to the particles created in the discharge that contribute to the film growth.One consequence of the incorporation of nanoparticles is the accelerated crystallization of the nanostructured silicon thin films when compared to standard a-Si:H, as shown by the electrical characterization during the annealing.