Benefits and limitations of radiatively heated suszeptors

摘要

In radiatively heated single wafer reactors,suszeptors are used to control the wafer temperature.This temperature,however,might be significantly different than the suszeptor temperature.The reason is that the conductive coupling o fthe suszeptor to the wafer is oftne small,even when the wafer is placed directly on the suszeptor,and the temperature difference is then determined by the optical properties and the spectral distribution of the illumination.