Preparation of Ti:sapphire thin films on sapphire substrates by XeCl excimer laser ablation

摘要

Abstract: This work summarized the results of XeCl excimer laserablation deposition procedure of Ti-doped sapphire thinfilms. Three types of targets areutilized-monocrystalline and two different ceramicssynthesized in vacuum and H$-2$/ ambient. The influenceof the target's type in the film quality is studied.The films are investigated by XRD and SEM, as well asby optical methods. Optical emission measurements oflaser ablated plumes are performed. !8