Preparation of Ti:sapphire thin films on sapphire substrates by XeClexcimer laser ablation,

摘要

Abstract: This work summarized the results of XeCl excimer laser ablation deposition procedure of Ti-doped sapphire thin films. Three types of targets are utilized-monocrystalline and two different ceramics synthesized in vacuum and H$-2$/ ambient. The influence of the target's type in the film quality is studied. The films are investigated by XRD and SEM, as well as by optical methods. Optical emission measurements of laser ablated plumes are performed. !8