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Processing and characterization of a 128 x 128 GaAs/GaAlAs quantum well infrared detector array

机译:128 x 128 GaAs / GaAlAs量子阱红外探测器阵列的处理和表征

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Abstract: A 128 multiplied by 128 GaAs/GaAlAs quantum well infrared (QWIP) sensing array with a 2- D grating and indium bumps has been fabricated. The array has been characterized prior to flip chip bonding, both electrically and optically. The obtained responsivity and dark current of selected pixels in the array indicate high material uniformity. Design and processing issues are discussed. !10
机译:摘要:制作了一个128乘以128 GaAs / GaAlAs量子阱红外(QWIP)传感阵列,该阵列具有二维光栅和铟凸块。在倒装芯片键合之前,已在电学和光学上对阵列进行了表征。阵列中选定像素的响应度和暗电流表示材料均匀性高。讨论了设计和处理问题。 !10

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