Optoelectronical gas sensors based on surface plasmon resonance in Si-structure

摘要

Abstract: The concept of surface plasmon resonance chemical sensors based on Si substrate is developed which combines a number of advantages of both optical and microelectronical approaches to investigate gaseous media. This type of the gas sensor has been made and tested for the first time. A reversible response to ntirogen dioxide at the level of ppm concentrations has been recorded. !9