Described are the two frontier areas of interest, that is, the measurement of refractive index distribution in gradient index glasses and the precise evaluation and measurement of optical surfaces for high precision optics. Scanning total reflection method and interferometric methods are applied to the refractive index measurement with an accuracy of 10$+$MIN@4$/ to 10$+$MIN@5$/. An AFM is found very useful for the evaluation of non-conductive surfaces as well as multilayers for x-ray optics. Methods for absolute measurement of surface profiles are proposed in consideration of the deformation due to gravity and another method for large surfaces.
展开▼
机译:描述是两个人的兴趣区域,即梯度指数玻璃中的折射率分布的测量以及用于高精度光学器件的光学表面的精确评估和测量。扫描总反射方法和干涉式方法应用于折射率测量,精度为10 $ + $ min @ 4 $ / 10 $ + $ min @ 5 $ /。发现AFM对于评估非导电表面以及X射线光学器件的多层非常有用。考虑到由于重力引起的变形以及大表面的另一种方法,提出了表面轮廓的绝对测量方法。
展开▼