首页> 外国专利> REFRACTIVE INDEX DISTRIBUTION MEASUREMENT METHOD, REFRACTIVE INDEX DISTRIBUTION MEASUREMENT DEVICE, AND OPTICAL ELEMENT MANUFACTURING METHOD

REFRACTIVE INDEX DISTRIBUTION MEASUREMENT METHOD, REFRACTIVE INDEX DISTRIBUTION MEASUREMENT DEVICE, AND OPTICAL ELEMENT MANUFACTURING METHOD

机译:折射指数分布测量方法,折射指数分布测量装置和光学元件制造方法

摘要

PROBLEM TO BE SOLVED: To measure the refractive index distribution of a lens to be inspected with high accuracy.;SOLUTION: A first reference lens 120 whose shape and refractive index are known and the first surface of a lens 60 be inspected are brought closer and a first interference fringe is measured, a second reference lens 125 whose shape and refractive index are known and the second surface of the lens 60 be inspected are brought closer and a second interference fringe is measured, and the transmission wavefront of the light having passed through the first reference lens 120, the lens 60 to be inspected, and the second reference lens 125. The shape of the first surface of the lens 60 be inspected is calculated from the first interference fringe, the shape of the second surface of the lens 60 be inspected is calculated from the second interference fringe, and the refractive index distribution of the lens 60 to be inspected is calculated using the refractive index of the first reference lens 120, the refractive index of the second reference lens 125, and the shapes of first and second surfaces and the transmission wavefront of the lens 60 to be inspected.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2016,JPO&INPIT
机译:解决的问题:为了高精度地测量待检查的透镜的折射率分布;解决方案:使形状和折射率已知的第一参考透镜120和待检查的透镜60的第一表面靠近并首先,测量第一干涉条纹,将形状和折射率已知的第二参考透镜125靠近,并且将被检查的透镜60的第二表面拉近,并且测量第二干涉条纹,并且已经穿过的光的透射波前第一基准透镜120,被检查透镜60和第二基准透镜125。根据第一干涉条纹,透镜60的第二表面的形状计算被检查透镜60的第一表面的形状。从第二干涉条纹计算出被检查物,使用第一基准的折射率计算被检查物60的折射率分布。透镜120,第二参考透镜125的折射率以及要检查的透镜60的第一和第二表面的形状以及透射波阵面。;选定的图纸:图1;版权:(C)2016,JPO&INPIT

著录项

  • 公开/公告号JP2016109592A

    专利类型

  • 公开/公告日2016-06-20

    原文格式PDF

  • 申请/专利权人 CANON INC;

    申请/专利号JP20140248476

  • 发明设计人 SUGIMOTO TOMOHIRO;

    申请日2014-12-08

  • 分类号G01N21/45;G01M11/00;

  • 国家 JP

  • 入库时间 2022-08-21 14:46:19

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