Abstract: Finish polishing of optics with magnetic media has evolved extensively over the past decade. Of the approaches conceived during this time, the most recently developed process is called magnetorheological finishing (MRF). In MRF, a magnetic field stiffens a fluid suspension in contact with a workpiece. The workpiece is mounted on the rotating spindle of a computer numerically controlled machine. Driven by an algorithm for machine control that contains information about the MRF process, the machine deterministically polishes out the workpiece by removing microns of subsurface damage, smoothing the surface to a microroughness of 10 angstroms rms, and correcting surface figure errors to less than 0.1 $mu@m p-v. Spheres and aspheres can be processed with the same machine set-up using the appropriate machine program. This paper describes MRF and gives examples which illustrate the capabilities of a pre-prototype machine located at the Center for Optics Manufacturing.!9
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机译：摘要：在过去的十年中，用磁性介质对光学器件进行的精抛光已经得到了广泛的发展。在此期间构想的方法中，最新开发的过程称为磁流变精加工（MRF）。在MRF中，磁场会使与工件接触的流体悬浮液变硬。工件安装在计算机数控机床的旋转主轴上。由包含有关MRF过程信息的机器控制算法驱动，该机器通过去除亚表面的微米级损伤，将表面平滑至10埃有效值的微粗糙度并将表面图形误差校正至小于0.1美元，来确定性地抛光工件。 mu @ m pv。可以使用适当的机器程序以相同的机器设置来处理球体和非球面。本文介绍了MRF，并举例说明了位于光学制造中心的预原型机的功能。9
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