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Magnetorheological finishing: a deterministic process for optics manufacturing

机译:磁流学整理:光学制造的确定性过程

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Finish polishing of optics with magnetic media has evolved extensively over the past decade. Of the approaches conceived during this time, the most recently developed process is called magnetorheological finishing (MRF). In MRF, a magnetic field stiffens a fluid suspension in contact with a workpiece. The workpiece is mounted on the rotating spindle of a computer numerically controlled machine. Driven by an algorithm for machine control that contains information about the MRF process, the machine deterministically polishes out the workpiece by removing microns of subsurface damage, smoothing the surface to a microroughness of 10 angstroms rms, and correcting surface figure errors to less than 0.1 $mu@m p-v. Spheres and aspheres can be processed with the same machine set-up using the appropriate machine program. This paper describes MRF and gives examples which illustrate the capabilities of a pre-prototype machine located at the Center for Optics Manufacturing.
机译:在过去十年中,使用磁介质的光学光学光学抛光已经在广泛演变。在此期间构思的方法,最近开发的过程称为磁流变精加工(MRF)。在MRF中,磁场使流体悬浮液与工件接触。工件安装在计算机数控机器的旋转主轴上。由一个机器控制算法驱动,该算法包含有关MRF过程的信息,机器通过去除微米损坏,将表面平滑到10埃rms的微小,并将表面图误差校正至小于0.1 $的微小,以小于0.1 $的微小损坏工件mu @ m pv。可以使用相应的机器程序使用相同的机器设置处理球形和非球面。本文描述了MRF,并提供了示例,其示出了位于光学制造中心的原型预制机的能力。

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