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Thin-shell replication of grazing incidence (Wolter type I) SiC mirrors

机译:掠入射的薄壳复制(Wolter I型)SiC镜

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Abstract: Near-net-shape replication and ion beam figuring technologies were investigated for chemical vapor deposited (CVD) SiC to fabricate high performance, glancing incidence Wolter Type I x-ray mirrors. Small scale CVD experiments were performed on graphite mandrels to demonstrate replication of SiC shells that closely matched the design of the XMM 40th shell at 1/16th scale. The SiC shells were successfully separated from the graphite mandrels and then machined to the required dimensions. Ion beam figuring as a final fabrication step was investigated on Wolter Type I replicated SiC surfaces. Angular sputtering yields and surface roughness evolution with material removal were found to be sufficiently well behaved to favor ion beam figuring as a means of performing the final figuring step. The CVD-SiC fabrication technology for the x-ray telescopes as developed above appears scaleable. Finally, analysis of a single element CVD-SiC telescope, modeled after the AXAF-S 26th shell showed telescope deflections and weight to be 2.23 and 2.77 times less, respectively, than for a nickel replicated shell of the same dimensions. !23
机译:摘要:研究了用于化学气相沉积(CVD)SiC的近净形复制和离子束刻蚀技术,以制造高性能,掠光入射Wolter I型X射线反射镜。在石墨心轴上进行了小规模的CVD实验,以证明SiC壳的复制与第XMM 40号壳的设计(1/16比例)非常匹配。将SiC壳成功地与石墨心轴分离,然后加工成所需的尺寸。在Wolter I型复制SiC表面上研究了离子束塑化作为最终制造步骤的过程。发现角溅射的产率和随着材料去除的表面粗糙度的演变表现得足够好,以有利于离子束的刻蚀,作为执行最终的刻蚀步骤的一种手段。上面开发的用于X射线望远镜的CVD-SiC制造技术似乎是可扩展的。最后,对以AXAF-S 26壳为模型的单元素CVD-SiC望远镜进行的分析显示,与相同尺寸的镍复制壳相比,望远镜的挠度和重量分别减小了2.23倍和2.77倍。 !23

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