Figure tolerance of a Wolter type Ⅰ mirror for a soft-x-ray microscope

摘要

The demand for an x-ray microscope has received much attention because of the desire to study living cells at a high resolution and in a hydrated environment. A Wolter type Ⅰ mirror used for soft-x-ray microscope optics has many advantages. From the mirror fabrication point of view, it is necessary to perform tolerance analysis, particularly with respect to figure errors that considerably degrade the image quality. The figure tolerance of a Wolter type Ⅰ mirror for a biological application in terms of the image quality and the state-of-the-art fabrication technology is discussed. The figure errors rapidly destroyed the image quality, and the required slope error depended on the detector used in the soft-x-ray microscope.