A novel structure of a linear microactuator of which moving principle stems from the motion of the inchworm has been designed and characterized. The proposed structure can overcome serious problems from which conventional linear microactuators suffer, primarily due to the moving principle that is the repetition of attachment and detachment of the moving part to the fixed part. According to the calculated results, the proposed microactuator can generate force of a few mN and the moving speed of 13 cm/min under the condition of 100 volts and the frequency of 1.4 kHz.
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机译:设计并表征了线性微致动器的新颖结构,其线性运动原理是由尺inch的运动引起的。所提出的结构可以克服传统的线性微致动器遭受的严重问题,这主要归因于运动原理,即重复运动部分与固定部分的附接和分离。根据计算结果,所提出的微致动器在100伏特和1.4 kHz频率的条件下可以产生几mN的力和13 cm / min的移动速度。
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