Sinterable glass-ceramics for high-performance substrates

摘要

Glasses in the MgO-Al/sub 2/O/sub 3/-SiO/sub 2/ system were developed for use in fabricating multilayer substrates with copper thick-film metallurgy. These glasses sintered dense in the glassy state and subsequently crystallized to yield glass-ceramics with alpha -cordierite as the principal crystalline phase. An understanding of the factors governing sintering, crystallization, and microstructure development has been obtained. The range of thermal expansion coefficients, dielectric constants, and flexural strengths of the sintered glass-ceramics met the requirements for a high-performance, multilayer substrate.