Multi-variable Velocity Feedback Controller for Piezoelectric Tube Scanner: A “Mixed” Negative-Imaginary and Small-Gain Approach

摘要

This paper presents the design and implementation of a multi-input multi-output (MIMO) velocity feedback controller (VFC) based on a recent theoretical results on “mixed” negative-imaginary and small-gain approach to damp the first resonant mode of a piezoelectric tube scanner (PTS) used in atomic force microscopes (AFMs).