An Analysis of Temperature Variation Effect on Response and Performance of Capacitive Microaccelerometer Inertial Sensors

机译：温度变化对电容式微加速度计惯性传感器响应和性能的影响分析

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There are many designed and manufactured microdevices including sensors and actuators. The most popular and widely used commercially available examples of these are rotational velocity sensors and linear acceleration sensors. These are commonly referred t

机译：有许多设计和制造的微型设备，包括传感器和执行器。这些中最流行和使用最广泛的市售示例是转速传感器和线性加速度传感器。这些通常被称为

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《Semiconductor Thermal Measurement, Modeling and Management Symposium》|2020年|91-96|共6页
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Jacek Nazdrowicz; Andrzej Napieralski;
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MEMS; accelerometer; inertial sensor; capacitances;

机译：MEMS;加速度计;惯性传感器;电容;

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4. An Analysis of Temperature Variation Effect on Response and Performance of Capacitive Microaccelerometer Inertial Sensors [C] . Jacek Nazdrowicz, Andrzej Napieralski Semiconductor Thermal Measurement, Modeling and Management Symposium . 2021

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An Analysis of Temperature Variation Effect on Response and Performance of Capacitive Microaccelerometer Inertial Sensors

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