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Influence of Aerodynamic Housing on the Performance of MEMS Wind Sensor

机译:气动外壳对MEMS风传感器性能的影响

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In this paper, the effects of the packaged housing with various parameters on the wind speed measurement was investigated, aiming to the find out the influence of different shape of packaged housing on the performance of MEMS wind sensor under different conditions of wind velocity. These parameters include pillar diameter, pillar height, number of pillars and the position of sensor. After that, a novel curve-shaped top cover for the protecting housing is presented to reduce the wind speed to the sensor in order to extend the measuring dynamic range. In the simulation, the 3D packaged sensor model was tested by using finite element method (FEM) software COMSOL in CFD (Computational Fluid Dynamics) module. The measured results demonstrate that with the increase of numbers, diameter and height of pillars, there is a rapid decline in simulated wind speed, and for a fixed pillar height, the sensor suffers from the largest wind speed when it is placed in the center position compared to other heights. In addition, the curved-shape roof can reduce the wind speed across the sensor effectively.
机译:本文研究了各种参数的封装外壳对风速测量的影响,旨在找出不同形状的封装外壳在不同风速条件下对MEMS风传感器性能的影响。这些参数包括支柱直径,支柱高度,支柱数量和传感器的位置。此后,提出了一种用于保护外壳的新型曲线形顶盖,以降低传感器的风速,从而扩大测量动态范围。在仿真中,使用CFD(计算流体动力学)模块中的有限元方法(FEM)软件COMSOL对3D封装的传感器模型进行了测试。测量结果表明,随着支柱数量,直径和高度的增加,模拟风速会迅速下降,并且对于固定的支柱高度,将传感器放置在中心位置时其风速最大与其他高度相比。另外,弯曲的屋顶可以有效降低传感器上的风速。

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