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Numerical Analysis of Impact Induced Failure for MEMS Membranes during Guided Free Fall Tests

机译:MEMS自由下落试验过程中MEMS膜撞击诱发失效的数值分析

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Impact effects on thin silicon MEMS membranes attached to dummy devices, as observed through guided free fall tests, are investigated through three-dimensional, finite element numerical simulations. Accounting for the different scales involved, a multisca
机译:通过引导的自由落体测试,通过三维有限元数值模拟研究了对连接到虚拟器件的薄硅MEMS膜的影响。考虑到所涉及的不同规模,

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