Dielectric Spectroscopy Characterization within a Microfluidic Device based on Open-Ended Coplanar Waveguide

摘要

This paper reports a new instrumented microdevice which allows the characterization of liquid media by dielectric spectroscopy. Coplanar waveguides (CPW) in an open-ended configuration are used within a microfluidic channel and compared according to the shape of the aperture: single open-end or interdigitated capacitor. These microdevices are used in order to extract dielectric permittivity properties of liquid media. Ihe proposed CPW sensors are analyzed and characterized in reflection within the frequency band ranging from 0.15 to 5 GHz. Microtechnologies are used to fabricate the devices which are coupled with microfluidic capability. The microfluidic channel is 100 $mu$m thick and typical size of the interdigital capacitor is associated to an area of 150 $mu$m length x90$mu$m width. Ihe volume under test is in the nanoliter range which is compatible with biological cells characterization and represents a progress in this field of interest.