Fabrication of Metallic Nano-Ring Arrays by Imprinting- Sputtering- Self Uplifting Methods with Localized Surface Plasmon Resonance Effect

摘要

This study proposed the efficient nanofabrication methods involve imprinting process with the non-hazardous chemical as well as Argon gas sputtering deposition process to fabricate metallic nanostructures on a substrate for optical sensing application. This manufacturing method is developing an efficient nanofabrication process of metallic nanostructures of the same size as the wavelength of visible light, such as a metallic nano-ring array on a quartz glass substrate. In this process, a polymer film mold is made by hot stamp method from a silicon wafer mother mold, and the polymer film mold is used to "chemical imprint" onto substrates. The polymer mold are very low cost and reusable. Then, a metal thin film is deposited on the stamped substrate by Argon gas spattering deposition. Finally, the nano-ring arrays are appeared on the substrate by a self-uplifting method using the vibration hot water dipping process. The optical properties of the nano-ring arrays are investigated. Most important advantages of this nanofabrication technology are "high throughput, low cost, and without the hazardous chemical in the process". Therefore, this new fabrication method is ready to transfer to the optical plasmonic bio-sensing application.