Germanium Light Source for Wafer-Level Inspection

机译：晶圆级检测用锗光源

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摘要

We describe a germanium light source for wafer-level inspection. The structure and dimensions of the light source are almost the same as those of a germanium photodiode, so that we can integrate them.

机译：我们描述了用于晶片级检查的锗光源。光源的结构和尺寸几乎与锗光电二极管的结构和尺寸相同，因此我们可以将它们集成在一起。

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《International Conference on Group IV Photonics》|2019年|1-2|共2页
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作者
Hiroshi Fukuda; Yoshiho Maeda; Shinji Matsuo; Toru Miura;
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关键词
Optical device fabrication; Germanium; Optical fibers; Light sources; Silicon; Testing;

机译：光学器件制造;锗;光纤;光源;硅;测试;

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专利

1. Wafer-Level Light Emitting Diode (WL-LED) Chip Simplified Package for Very-High Power Solid-State Lighting (SSL) Source [J] . Zhang Yibin, Xu Jianwei, Ding Mingdi, Electron Device Letters, IEEE . 2016,第2期

机译：晶圆级发光二极管（WL-LED）芯片简化封装，用于超高功率固态照明（SSL）源
2. Micro inspection for wafer bumping: Inspection requirements for wafer-level packaging processes [J] . Steve Hiebert Advanced Packaging . 2002,第2期

机译：晶片隆起的微观检查：晶片级封装工艺的检查要求
3. Towards monolithic integration of germanium light sources on silicon chips [J] . Saito Shinichi, Al-Attili Abdelrahman Zaher, Oda Katsuya, Semiconductor science and technology . 2016,第4期

机译：在硅芯片上实现锗光源的单片集成
4. Germanium Light Source for Wafer-Level Inspection [C] . Hiroshi Fukuda, Yoshiho Maeda, Shinji Matsuo, International Conference on Group IV Photonics . 2019

机译：锗光源用于晶圆级检查
5. Investigation of light absorption and emission in germanium and germanium tin films grown on silicon substrates. [D] . Mathews, Jay. 2011

机译：研究硅衬底上生长的锗和锗锡膜中的光吸收和发射。
6. Development of a clockwork light source to enable cervical inspection by village health workers [O] . Fidelma OMahony, Bob Bailey, Chris Koller, 2002

机译：开发一种发条光源以使乡村卫生工作者能够进行宫颈检查
7. Strain-engineering in Germanium membranes towards light sources on Silicon [O] . Burt D, Al-Attili AZ, Li Z, 2017

机译：锗膜中的应变工程朝向硅上的光源

Germanium Light Source for Wafer-Level Inspection

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