Piezoresistive Effect of Interdigitated Electrode Spacing Graphene-based MEMS Intracranial Pressure Sensor

摘要

Two-dimensional (2D) materials have recently drawn great attention among researchers for emerging electronics. Among these materials, graphene has shown great potential in various types of sensor applications due to its superior electronic and mechanical properties. Its two-dimensionality as well as its high flexibility, conductivity, and transparency make graphene a promising candidate for flexible electronics. This paper reports the development of resistive graphene-based MEMS pressure sensor integrated with interdigitated electrode. These interdigitated electrode structure act as pressure magnifying structure as well as reducing the output non-linearity. A COMSOL simulation was carried out for design optimization of the resistive pressure sensor. In this study, the effect of optimization of the spacing between the Al electrodes is presented to improve the performance of graphene-based pressure sensors at room temperature. Three different spacing distances of 10, 20 and 40 μ m were used as the experimental parameters. The increased spacing could affect in increasing tensile strain on graphene and increased defect generation at the grain boundaries. Therefore, the pressure sensor response could also be improved by increasing the spacing of the interdigitated electrode.