Finite-Element-Method Study of a New Type Water Cooling Deformable Mirror

摘要

In order to reduce the thermal distortion of the deformable mirror(DM) and improve the laser beam quality, a new type of a 19-element water cooling deformable mirror was developed, and the finite element model of DM with water cooling part was built. The deformation, temperature rising and high-order aberrations were calculated after applying the laser irradiation to the mirror. Based on the results, we found the distortions and temperature rising of DM with water cooling part are much lower than those without it. The thermal distortion and temperature rising decreased from 0.316 urn to 0.210 μm and from 30. 3 °C to 27.1 °C respectively, and the corresponding removed low-order Zernike coefficient residual error was reduced from 0.068 μm to 0.043 μm. The high-order aberrations between them were different. The results have practical engineering application for the design of DM in future higher power laser systems.