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Effects of Epoxy Molding Compound on Electrical Resistance Degradation of Pd-Coated Cu Wire Bonds in the 175 °C to 225 °C Range

机译:环氧树脂在175°C至225°C范围内对Pd包覆的Cu丝键合电阻降解的影响

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We present electrical resistance measurements of PCC wires bonded to Al pads and aged at temperatures of 175 °C, 200 °C, and 225 °C. Wires were arranged to enable four-wire measurements of pairs of wires in series, and monitored throughout the aging process. The wires used were 25 µm diameter PCC and bare Cu. Bonded ball diameters were 61 µm and 75 µm, and the mean ball shear strength was between 120 MPa and 130 MPa for all of the bond groups. We tested samples without encapsulation or with one of two different encapsulants and Al pad thicknesses of 800 nm and 3000 nm in various combinations. We also tested the effect of plasma cleaning of substrates before bonding compared to the combination of solvent and plasma cleaning of substrates and test ovens. Lifetimes were longer for unencapsulated bonds. At 225 °C, for bonds on 3000 nm thick pads, the median time until 10 % resistance increase ranged from 253 h with the worse encapsulant and limited cleaning to 986 h with no encapsulant and the full cleaning procedure. The activation energy for failures on 3000 nm thick pads, calculated from the time to reach 10 % resistance change for each temperature, was 0.37 ± 0.05 eV. We present cross-sections of bonds after aging for failure analysis.
机译:我们提供了PCC导线的电阻测量值,这些导线粘结在Al焊盘上并在175°C,200°C和225°C的温度下老化。布置导线以实现对成对导线的四线测量,并在整个老化过程中对其进行监控。所使用的导线为直径25 µm的PCC和裸露的Cu。粘结球的直径分别为61 µm和75 µm,所有粘结基团的平均球剪切强度在120 MPa和130 MPa之间。我们测试了没有封装的样品,或者使用两种不同的封装剂之一以及800 nm和3000 nm的Al焊盘厚度的各种组合对样品进行了测试。与溶剂和等离子清洗衬底以及测试炉的组合相比,我们还测试了粘合之前等离子清洗衬底的效果。未封装的键的寿命更长。在225°C下,对于在3000 nm厚的焊盘上的键合,直到10%电阻增加的中值时间范围为253小时(使用较差的密封剂和有限的清洁时间)至986 h(不使用密封剂和完整的清洁步骤)。从在每个温度下达到10%电阻变化的时间计算,在3000 nm厚的焊盘上失效的激活能为0.37±0.05 eV。我们提供了老化后的粘结截面,以进行失效分析。

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