Influence of Process Parameters on Quality and Properties of Microfluidic Components Made in KEKO SK47 Substrates

摘要

In the paper, the impact of the technological process parameters on geometry of microfluidic structures made in LTCC (Low Temperature Co-fired Ceramics) substrate is studied. Two technological steps - laser micromachining and isostatic lamination - were taken into account. We have investigated influence of laser beam velocity, frequency of laser pulses and on/off delay time on cutting quality of the LTCC material in a green state. Moreover, impact of pressure and temperature of the isostatic lamination on geometry of microchannels fabricated in the LTCC substrate and shrinkage of the fired LTCC are examined. In order to determine how strongly the process parameters influenced the quality of the LTCC-based microfluidic structures an Analysis of Variance (ANOVA) method was used. Basing on the obtained results, it is possible to select the optimal parameters of the laser micromachining and isostatic lamination processes for fabrication of various microfluidic components.