Deposition of Anthracene by Low Pressure Organic Vapor Phase Deposition

摘要

This work presents results of deposition of anthracene, an organic material, on typical substrates used in micro and nano systems such as Indium Tin Oxide (ITO) coated glass and silicon wafer. A low cost, low pressure organic vapor phase deposition chamber was developed and used to deposit the anthracene with different deposition parameters. Anthracene was also deposited onto ITO glass and silicon wafer coated with PEDOT:PSS. Our experimental results show controlled deposition using the chamber on the most common substrates. The deposited anthracene forms crystals after deposition and the uniformity and thickness of the deposited samples are measured and analyzed.