On the Low-Frequency Noise of High-κ Gate Stacks: What Did We Learn?

机译：关于高κ门堆栈的低频噪声：我们学到了什么？

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A review is given on the low-frequency (LF) noise behavior of transistors fabricated with a high-κ/metal gate stack. It is shown that the implementation of a work function tuning metal oxide cap layer has a pronounced impact on the gate stack quality and more in particular on the effective density of oxide traps.

机译：本文对使用高κ/金属栅叠层制造的晶体管的低频（LF）噪声行为进行了综述。结果表明，功函数调整金属氧化物覆盖层的实施对栅极叠层质量，尤其是对氧化物陷阱的有效密度具有显着影响。

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《IEEE International Conference on Solid-State and Integrated Circuit Technology》|2018年|1-4|共4页
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Eddy Simoen; Romain Ritzenthaler; Tom Schram; Hiroaki Arimura; Naoto Horiguchi; Cor Claeys;
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MOSFET circuits; Logic gates; Hafnium compounds; Aluminum oxide; Low-frequency noise; Random access memory; Tunneling;

机译：MOSFET电路;逻辑门; H化合物;氧化铝;低频噪声;随机存取存储器;隧道;

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专利

1. Low-Frequency Noise Investigation and Noise Variability Analysis in High- $k$/Metal Gate 32-nm CMOS Transistors [J] . Lopez D., Haendler S., Leyris C., Electron Devices, IEEE Transactions on . 2011,第8期

机译：高$ k $ /金属栅32-nm CMOS晶体管中的低频噪声研究和噪声变异性分析
2. Investigation of Gate Etch Damage at Metal/High- Gate Dielectric Stack Through Random Telegraph Noise in Gate Edge Direct Tunneling Current [J] . Cho H.-J., Son Y., Oh B., Electron Device Letters, IEEE . 2011,第4期

机译：通过栅极边缘直接隧穿电流中的随机电报噪声研究金属/高栅极电介质堆叠中的栅极蚀刻损伤
3. $1/f$ Noise in Drain and Gate Current of MOSFETs With High-$k$ Gate Stacks [J] . Magnone P., Crupi F., Giusi G., Device and Materials Reliability, IEEE Transactions on . 2009,第2期

机译：具有高$ k $栅极堆叠的MOSFET的漏极和栅极电流中的$ 1 / f $噪声
4. On the Low-Frequency Noise of High-κ Gate Stacks: What Did We Learn? [C] . Eddy Simoen, Romain Ritzenthaler, Tom Schram, IEEE International Conference on Solid-State and Integrated Circuit Technology . 2018

机译：在高κ门堆栈的低频噪声上：我们学到了什么？
5. The thermomechanical response of composite energetic materials under high- and low-frequency mechanical excitations. [D] . Miller, Jacob K. 2016

机译：复合高能材料在高频和低频机械激励下的热力学响应。
6. Opposite effects of high- and low-frequency transcranial random noise stimulation probed with visual motion adaptation [O] . Gianluca Campana, Rebecca Camilleri, Beatrice Moret, -1

机译：视觉运动适应探测高频和低频经颅随机噪声刺激的相反作用
7. A study of low-frequency noise on high-k/metal gate stacks with in situ SiOx interfacial layer [O] . Olyaei, Maryam, Malm, B. Gunnar, Dentoni Litta, Eugenio, 2013

机译：具有原位SiOx界面层的高k /金属栅叠层上的低频噪声研究

On the Low-Frequency Noise of High-κ Gate Stacks: What Did We Learn?

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