Full system for piezoelectric organic MEMS resonators operating in liquid media

摘要

Here is presented a full compact system enabling the integrated actuation and measurement of the resonance frequency of piezoelectric organic MEMS resonators in liquid media. The resonators contain a piezoelectric layer made of PVDF-TrFE for both the actuation and the read­out of the MEMS. They are included into a watertight enclosure associated with a PCB and a dedicated electronic card, allowing electrical measurements in air and liquid media. An application for viscosity measurements of water/glycerol mixtures is presented and shows that results match with measurements made with a viscometer, without any knowledge of the mass density.