Metal-tip-array field emission cathodes for X-ray tubes

摘要

Metal-tip-array field emission cathodes with non-integrated mesh gates are proposed to be the electron sources for X-ray tubes. The cathodes theoretically have better emission uniformity than carbon nanotubes (CNTs) cathodes which are most used in field emission X-ray tubes and work more stable than cathodes with near-integrated gate. The cathodes are fabricated mainly based on Spindt cathodes process in present and the process is expected to be simplified in further research.