Mathematical modelling of microbolometers at oblique incidence

摘要

The literature segment of this paper delves into the enhanced mathematical model that is used to calculate the total electric and magnetic field for light ray's incident at oblique angles varying from 1-89 degrees for s and p polarizations in sensor structure followed by the calculation of fractional reflected and absorbed power. A brief description of the sensor structure followed by validation of the mathematical model and a tabular summarization of the maximum power reflected and absorbed at respective angles of incidences for the wavelength range of 5-14 μm is done. The novelty of this research will help in fabrication of microbolometers at oblique angles to optimize the absorbed power.