Development of the polishing tool system based on the pneumatic force servo

摘要

The deterministic polishing process is usually used to reduce the roughness and improve the form accuracy for the high precision optical part and mold surfaces. The polishing process is regarded as deterministic if the material removal during the polishing is controllable, thus the control of the polishing force is required essentially for the deterministic polishing. According to the polishing compliance principle, a position-force decoupled polishing system based on a pneumatic force servo is designed and developed. The real-time control platform consists of the data acquisition card, Labview software and Labview Real-time module is configured. With the input of Pseudo Random Binary Sequence (PRBS) signals and output force data, the system model is identified by the least square method. The PID controller is implemented and experimentally tested in the polishing system. The polishing experiments are conducted to verify the effectiveness of the polishing tool.