Development of planar inductive sensor for proximity sensing based on LTCC

摘要

This paper is focused on design and realization of the planar inductive sensor system used for proximity sensing based on Low Temperature Co-fire Ceramics (LTCC). Planar coil consisting of six layers was designed, produced and measured. Electronic system for driving coil and processing measured values was developed and realized. Proximity measurement of various metal materials was realized and results were processed and evaluated.