A six-axis micro platform for in situ calibration of MEMS inertial sensors

摘要

This paper reports an advanced multi-axis micro actuation and sensing platform for in situ self-calibration of generic MEMS inertial sensors. Compared to previously reported platforms, the device provides the best performance at smallest footprint, with six-axis actuation at low power consumption, off-axis motion compensation, closed-loop capacitive sensing of applied stimulus, integrated interconnects to an inertial sensor load, and increased shock protection. The entire platform is confined to 9×9 mm2.