A parylene micropipette array for enabling simultaneous detection of different target analytes on a CMOS sensor array

摘要

This study reports a 4×1 parylene micropipette array for locally and selectively functionalizing the surface of a CMOS-based hall sensor array with different capture antibodies. The proposed device is the key to enable simultaneously detecting different target analytes in a sample solution on a SoC chip. The proposed parylene micropipette array was fabricated by using the embedded parylene channel fabrication process. Experiment results showed the micropipette can locally functionalize capture antibodies on the top of individual Hall sensors, and the functionalized magnetic beads can be effectively captured and detected by the hall sensors.