Ultra-low power self-computing binary output digital MEMS accelerometer

摘要

This work presents the concept and preliminary results for electromechanical self-computing binary output digital accelerometers. Such devices require only bias voltages and no readout or control electronics for operation (zero static power for operation). The device comprises of a number of acceleration switches (equal to the number of the bits of resolution) which are coupled to each other via electrostatic actuators. As a result of an applied acceleration and interactions of switches and actuators with each other, a digitized binary acceleration output is generated. In this work, a 2-bit accelerometer operating in the 0-1g range is successfully demonstrated.