Characterization of a Small Form Factor Multipole RGAfor Process Chamber Monitoring and for Reduction in Timeto Complete Routine Preventive Maintenance

摘要

A small form-factor, multipole Residual Gas Analyzer (RGA) has been used to study steady state and post-PM conditions in an Axcelis GSD ion implanter. The RGA properties and specifications are discussed and data ispresented to illustrate N_2, O_and H_2Opump-down curve characteristics. Baseline performance is compared toperformance following invasive activities to determine applicability for eliminating explicit He leak checkingrequirements and for the determination of how quickly a machine may be returned to production. The target ionimplanter was an Axcelis GSD/200E.