ROLL-TO-ROLL ATOMIC LAYER DEPOSITION FOR FLEXIBLE SUBSTRATES (PPT)

摘要

1. Introduction Conventional batch ALD process Spatial ALD Roll-to-roll atomic layer deposition (R2R ALD) 2. Materials and methods Extrusion-coated papers and paperboards ALD processes for Al2O3 coatings Characterisation: WVTR, O2TR, adhesion, sealability 3. Results and Discussion 4. Conclusions