Measurement of the Frictional Force Between PVA Roller Brushes and Semiconductor Wafers with Various Films Immersed In Chemicals

摘要

To better understanding the lubrication condition between a polyvinyl acetal (PVA) brush and cleaning surfaces, we measured the frictional force between the PVA roller brushes and the semiconductor wafers with various films immersed in chemicals. The frictional force showed different tendencies depending on the combination of chemicals and surface films. Especially, the large fluctuation of friction force was observed under the combination of Cu and NH4_OH.